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Effects of the Multilayer Structure on the Responsivity of Pyroelectric Thin Film Detectors
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AbstractPyroelectric thin film detectors have advantages of wavelength independent sensitivity, room temperature operation and direct incorporation with integrated circuit amplifiers. Pyroelectric thin films with good quality have be prepared by many advanced thin film technologies [1-2]. The responsivity of pyroelectric thin film detectors is dependent on the thermal properties of the substrate, on which pyroelectric thin film detectors are prepared. The heat conduction in the detectors was investigated using the one-dimensional heat flow equation and the expressions describing the detectors performance were derived for pyroelectric thin films detectors with multilayer structure. The numerical simulation showed that the pyroelectric thin film detectors need effective heat isolation. If the air gap could be the heat isolation layer, which is between the bottom electrode and substrate, the iesponsivity of detectors would be higher than that of detectors which have no heat isolation in certain modulation frequency range.
Springer Science and Business Media LLC
Title: Effects of the Multilayer Structure on the Responsivity of Pyroelectric Thin Film Detectors
Description:
AbstractPyroelectric thin film detectors have advantages of wavelength independent sensitivity, room temperature operation and direct incorporation with integrated circuit amplifiers.
Pyroelectric thin films with good quality have be prepared by many advanced thin film technologies [1-2].
The responsivity of pyroelectric thin film detectors is dependent on the thermal properties of the substrate, on which pyroelectric thin film detectors are prepared.
The heat conduction in the detectors was investigated using the one-dimensional heat flow equation and the expressions describing the detectors performance were derived for pyroelectric thin films detectors with multilayer structure.
The numerical simulation showed that the pyroelectric thin film detectors need effective heat isolation.
If the air gap could be the heat isolation layer, which is between the bottom electrode and substrate, the iesponsivity of detectors would be higher than that of detectors which have no heat isolation in certain modulation frequency range.
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